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IEICE Trans

Keyword : electrostatic actuator

Electrostatic Actuator with Electret
Mitsuo ICHIYA Fumihiro KASANO Hiromi NISHIMURA Jacques LEWINER Didier PERINO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1995/02/25
Vol. E78-C  No. 2 ; pp. 128-131
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachines and Micro Electro Mechanical Systems)
Category: 
Keyword: 
electrostatic actuator, electret, silicon dioxide, relay, latching, 
 Summary | Full Text:PDF