Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2007/07/01 Vol. E90-CNo. 7 ;
pp. 1435-1440 Type of Manuscript: Special Section PAPER (Special Section on Recent Development of Electromechanical Devices (Selected Papers from ICEC2006)) Category: Materials Keyword: carbon, thin film, electrical conductivity, wear durability, metal-doping,