Interaction of Bis-diethylaminosilane with a Hydroxylized Si (001) Surface for SiO2 Thin-Film Growth Using Density Functional Theory Seung-Bin BAEKDae-Hee KIMYeong-Cheol KIM
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2011/05/01 Vol. E94-CNo. 5 ;
pp. 771-774 Type of Manuscript: Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices) Category: Keyword: atomic layer deposition, Bis-diethylaminosilane, density functional theory, SiO2,