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IEICE Trans

Keyword : defect localization

New Approach of Laser-SQUID Microscopy to LSI Failure Analysis
Kiyoshi NIKAWA Shouji INOUE Tatsuoki NAGAISHI Toru MATSUMOTO Katsuyoshi MIURA Koji NAKAMAE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2009/03/01
Vol. E92-C  No. 3 ; pp. 327-333
Type of Manuscript:  INVITED PAPER (Special Section on Recent Progress in Superconducting Analog Devices and Their Applications)
Category: 
Keyword: 
SQUID, laser, LSI chip, failure analysis, defect localization, 
 Summary | Full Text:PDF