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IEICE Trans

Keyword : defect density

Fabrication Process for Superconducting Digital Circuits
Mutsuo HIDAKA Shuichi NAGASAWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2021/09/01
Vol. E104-C  No. 9 ; pp. 405-410
Type of Manuscript:  INVITED PAPER (Special Section on Fabrication of Superconductor Devices; Key Technology in Superconductor Electronics)
Category: 
Keyword: 
superconducting integrated circuits, Josephson junction, fabrication process, controllability, uniformity, defect density, 
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