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IEICE Trans

Keyword : contamination solution

The Nature of Metallic Contamination on Various Silicon Substrates
Geun-Min CHOI Hiroshi MORITA Jong-Soo KIM Tadahiro OHMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/10/25
Vol. E82-C  No. 10 ; pp. 1839-1845
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
crystalline silicon, amorphous silicon, contamination solution, native oxide, copper impurity, 
 Summary | Full Text:PDF