Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2013/09/01 Vol. E96-CNo. 9 ;
pp. 1097-1103 Type of Manuscript: INVITED PAPER (Special Section on Recent Development of Electro-Mechanical Devices — Papers selected from International Session on Electro-Mechanical Devices 2012 (IS-EMD2012) and other recent research results —) Category: Keyword: carbon nanotubes, contact surface, MEMS switching surface, fine transfer mechanism, contact resistance,