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IEICE Trans

Keyword : complementary metal oxide semiconductor

Uniform Raised-Salicide Technology for High-Performance CMOS Devices
Hitoshi WAKABAYASHI Takeshi ANDOH Tohru MOGAMI Toru TATSUMI Takemitsu KUNIO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/05/01
Vol. E85-C  No. 5 ; pp. 1104-1110
Type of Manuscript:  Special Section PAPER (Special Issue on Advanced Sub-0.1 µm CMOS Devices)
Category: 
Keyword: 
complementary metal oxide semiconductor, salicide, raised salicide, silicon selective epitaxial growth, pit, 
 Summary | Full Text:PDF