Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1996/03/25 Vol. E79-CNo. 3 ;
pp. 312-316 Type of Manuscript: Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology) Category: Particle/Defect Control and Analysis Keyword: particle growth, particle, defect, clean technology, film deposition,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1994/03/25 Vol. E77-CNo. 3 ;
pp. 486-491 Type of Manuscript: Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies) Category: Process Technology Keyword: clean technology, particle, defect, equipment, particle source,