Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2007/12/01 Vol. E90-CNo. 12 ;
pp. 2192-2197 Type of Manuscript: Special Section PAPER (Special Section on Recent Technologies for Microwave and Millimeter-wave Passive Devices) Category: Keyword: cavity resonators, micromachining, RF MEMS, X-ray lithography, high Q,