IEICE Trans

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IEICE Trans

Keyword : catalytic behavior

Cr₂O₃ Passivated Gas Tubing System for Specialty Gases Yasuyuki SHIRAI Masaki NARAZAKI Tadahiro OHMI
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1996/03/25 Vol. E79-C No. 3 ; pp. 385-391 Type of Manuscript: Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology) Category: Keyword: Cr₂O₃, ferritic stainless steel, dry down performance, catalytic behavior, corrosion resistance,
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