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IEICE Trans

Keyword : catalysis

Improved Resistance Against the Reductive Ambient Annealing of Ferroelectric Pb(Zr, Ti)O3 Thin Film Capacitors with IrO2 Top Electrode
Yoshihisa FUJISAKI Keiko KUSHIDA-ABDELGHAFAR Hiroshi MIKI Yasuhiro SHIMAMOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1998/04/25
Vol. E81-C  No. 4 ; pp. 518-522
Type of Manuscript:  Special Section PAPER (Special Issue on Advanced Memory Devices Using High-Dielectric-Constant and Ferroelectric Thin Films)
Category: 
Keyword: 
PZT, IrO2, ferroelectric, hydrogen, catalysis, 
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