Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2003/03/01 Vol. E86-CNo. 3 ;
pp. 276-283 Type of Manuscript: INVITED PAPER (Special Issue on the 2002 IEEE International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'02)) Category: Keyword: atomistic, diffusion, activation, doping fluctuations, silicon,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2003/03/01 Vol. E86-CNo. 3 ;
pp. 409-415 Type of Manuscript: INVITED PAPER (Special Issue on the 2002 IEEE International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'02)) Category: Keyword: atomistic, fluctuation, process simulation, device simulation,