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IEICE Trans

Keyword : atomic structure

Characterization of Buried Si Atomic Structures by High-Energy Ion Scattering Technique
Eiji KAMIYA Jong MOON Toshimichi ITO Akio HIRAKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/09/25
Vol. E75-C  No. 9 ; pp. 1001-1006
Type of Manuscript:  Special Section PAPER (Special Issue on Silicon Devices and Materials)
Category: 
Keyword: 
atomic structure, high-energy ion scattering, ion channeling, Monte Carlo simulation, 
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