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| Keyword : actuators
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Recent MEMS Research Activities in Japan Hiroyuki FUJITA | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C
No. 2 ;
pp. 198-205
Type of Manuscript:
INVITED PAPER (Special Issue on Micromachine Technology)
Category: Keyword: MEMS, micromachines, actuators, sensors, | | | Summary | Full Text:PDF | |
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