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IEICE Trans

Keyword : activation

The Process Modeling Hierarchy: Connecting Atomistic Calculations to Nanoscale Behavior
Scott T. DUNHAM Pavel FASTENKO Zudian QIN Milan DIEBEL 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/03/01
Vol. E86-C  No. 3 ; pp. 276-283
Type of Manuscript:  INVITED PAPER (Special Issue on the 2002 IEEE International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'02))
Category: 
Keyword: 
atomistic, diffusion, activation, doping fluctuations, silicon, 
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