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IEICE Trans

Keyword : ZrN

Thermal Stability of ZrN Barrier in W/ZrN/poly-Si Gate Electrode Configuration
Atsushi NOYA Mayumi B. TAKEYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/05/01
Vol. E84-C  No. 5 ; pp. 704-706
Type of Manuscript:  LETTER
Category: Electronic Materials
Keyword: 
metallization, MOS, gate electrode, ZrN, 
 Summary | Full Text:PDF