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IEICE Trans

Keyword : X-ray lithography

Design and Fabrication of PTFE Substrate-Integrated Waveguide Butler Matrix for Short Millimeter Waves
Mitsuyoshi KISHIHARA Kaito FUJITANI Akinobu YAMAGUCHI Yuichi UTSUMI Isao OHTA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2023/03/01
Vol. E106-C  No. 3 ; pp. 111-115
Type of Manuscript:  BRIEF PAPER
Category: Microwaves, Millimeter-Waves
Keyword: 
microstructure, X-ray lithography, dielectric loaded waveguides, Butler matrix, millimeter wave circuits, 
 Summary | Full Text:PDF
Design and Fabrication of PTFE Substrate Integrated Waveguide Coupler by SR Direct Etching
Mitsuyoshi KISHIHARA Masaya TAKEUCHI Akinobu YAMAGUCHI Yuichi UTSUMI Isao OHTA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2021/09/01
Vol. E104-C  No. 9 ; pp. 446-454
Type of Manuscript:  PAPER
Category: Microwaves, Millimeter-Waves
Keyword: 
microstructure, X-ray lithography, dielectric loaded waveguides, couplers, millimeter wave circuits, 
 Summary | Full Text:PDF
Fabrication of Integrated PTFE-Filled Waveguide Butler Matrix for Short Millimeter-Wave by SR Direct Etching
Mitsuyoshi KISHIHARA Masaya TAKEUCHI Akinobu YAMAGUCHI Yuichi UTSUMI Isao OHTA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2018/06/01
Vol. E101-C  No. 6 ; pp. 416-422
Type of Manuscript:  PAPER
Category: Microwaves, Millimeter-Waves
Keyword: 
microstructure, X-ray lithography, dielectric loaded waveguides, Butler matrix, millimeter wave circuits, 
 Summary | Full Text:PDF
Design and Fabrication of PTFE-Filled Waveguide Components by SR Direct Etching
Mitsuyoshi KISHIHARA Hiroaki IKEUCHI Yuichi UTSUMI Tadashi KAWAI Isao OHTA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2012/01/01
Vol. E95-C  No. 1 ; pp. 122-129
Type of Manuscript:  PAPER
Category: Microwaves, Millimeter-Waves
Keyword: 
X-ray lithography, bandpass filters, directional couplers, sputtering, dielectric materials, 
 Summary | Full Text:PDF
An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography
Zhen MA David M. KLYMYSHYN Sven ACHENBACH Martin BORNER Nina DAMBROWSKY Jurgen MOHR 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/12/01
Vol. E90-C  No. 12 ; pp. 2192-2197
Type of Manuscript:  Special Section PAPER (Special Section on Recent Technologies for Microwave and Millimeter-wave Passive Devices)
Category: 
Keyword: 
cavity resonators, micromachining, RF MEMS, X-ray lithography, high Q, 
 Summary | Full Text:PDF
A 0.25-µm BiCMOS Technology Using SOR X-Ray Lithography
Shinsuke KONAKA Hakaru KYURAGI Toshio KOBAYASHI Kimiyoshi DEGUCHI Eiichi YAMAMOTO Shigehisa OHKI Yousuke YAMAMOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 355-361
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Device Technology
Keyword: 
BiCMOS, X-ray lithography, SOR, self-aligned bipolar, metallization, 
 Summary | Full Text:PDF
The Analysis of Waveguiding Effects on the Minimum Transferable Linewidth of an Ultrafine X-Ray Mask
Masaki TAKAKUWA Kazuhito FURUYA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/04/25
Vol. E76-C  No. 4 ; pp. 594-599
Type of Manuscript:  Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
quantum size structure, X-ray lithography, minimum transferable linewidth, electron wave devices, 
 Summary | Full Text:PDF