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IEICE Trans

Keyword : SOI structure

Analysis of Localized Temperature Distribution in SOI Devices
Hizuru YAMAGUCHI Shigeki HIRASAWA Nobuo OWADA Nobuyoshi NATSUAKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/12/25
Vol. E75-C  No. 12 ; pp. 1438-1441
Type of Manuscript:  Special Section PAPER (Special Issue on SOI (Si on Insulator) Devices)
Category: SOI Devices
Keyword: 
numerical simulation, temperature distribution, SOI structure, trench isolation, 
 Summary | Full Text:PDF