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IEICE Trans

Keyword : SIO structure

High Speed Crystallization of a-Si by Lateral Sweep Annealing in Steep Temperature Gradient
Akio KITAGAWA Masaki TAKEUCHI Sadaki FUTAGI Syungo KANAI Kazunori TUBOTA Yasuhiro KIZU Masakuni SUZUKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/09/25
Vol. E75-C  No. 9 ; pp. 1031-1035
Type of Manuscript:  Special Section PAPER (Special Issue on Silicon Devices and Materials)
Category: 
Keyword: 
SIO structure, crystallization, poly-Si film, gas flame annealing, solid phase epitaxy, 
 Summary | Full Text:PDF