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IEICE Trans

Keyword : RHEED

Fabrication of β-FeSi2 Films on Si(111) Using Solid-Phase Growth Reaction from Fe and FeSi Sources
Katsuaki MOMIYAMA Kensaku KANOMATA Shigeru KUBOTA Fumihiko HIROSE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2013/05/01
Vol. E96-C  No. 5 ; pp. 690-693
Type of Manuscript:  BRIEF PAPER
Category: 
Keyword: 
β-FeSi2, silicide, solid phase growth, RHEED, 
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