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IEICE Trans

Keyword : Ohmic contact

A Study on Ohmic Contact to Dry-Etched p-GaN
Cheng-Yu HU Jin-Ping AO Masaya OKADA Yasuo OHNO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/07/01
Vol. E91-C  No. 7 ; pp. 1020-1024
Type of Manuscript:  Special Section PAPER (Special Section on Heterostructure Microelectronics with TWHM 2007)
Category: GaN Process Technology
Keyword: 
Ohmic contact, p-GaN, dry-etching, etching damage, SiCl4, 
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