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IEICE Trans

Keyword : LOCOS isolation

Study of LOCOS-Induced Anomalous Leakage Current in Thin Film SOI MOSFET's
Shigeru KAWANAKA Shinji ONGA Takako OKADA Michihiro OOSE Toshihiko IINUMA Tomoaki SHINO Takashi YAMADA Makoto YOSHIMI Shigeyoshi WATANABE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/07/25
Vol. E82-C  No. 7 ; pp. 1341-1346
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
SOI, LOCOS isolation, crystal defect, leakage current, stress, 
 Summary | Full Text:PDF