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Keyword : Hf inter layer

The Effect of Inter Layers on the Ferroelectric Undoped HfO₂ Formation Masakazu TANUMA Joong-Won SHIN Shun-ichiro OHMI
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2022/10/01 Vol. E105-C No. 10 ; pp. 584-588 Type of Manuscript: Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices) Category: Keyword: ferroelectric HfO₂, RF magnetron sputtering, Hf inter layer, chemical oxide inter layer,
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