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IEICE Trans

Keyword : Cat-CVD

Role of Hydrogen in Polycrystallne Si by Excimer Laser Annealing
Naoya KAWAMOTO Naoto MATSUO Atsushi MASUDA Yoshitaka KITAMON Hideki MATSUMURA Yasunori HARADA Tadaki MIYOSHI Hiroki HAMADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2005/02/01
Vol. E88-C  No. 2 ; pp. 241-246
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
polycrystalline Si, excimer laser annealing, hydrogen, secondary grain growth, stress relaxation, Cat-CVD, 
 Summary | Full Text:PDF