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IEICE Trans

Keyword : CAD layout

Matching of DUT Interconnection Pattern with CAD Layout in CAD-Linked Electron Beam Test System
Koji NAKAMAE Ryo NAKAGAKI Katsuyoshi MIURA Hiromu FUJIOKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/04/25
Vol. E77-C  No. 4 ; pp. 567-573
Type of Manuscript:  Special Section PAPER (Special Issue on LSI Failure Analysis)
Category: 
Keyword: 
vacuum and beam technologies, electron beam testing, pattern matching, CAD layout, 
 Summary | Full Text:PDF