IEICE Trans

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IEICE Trans

Keyword : profilometry

A New Approach to 3-D Profilometry for the White Light Interferometric (WLI) Seok-Moon RYOO Tae-Sun CHOI
Publication: IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences Publication Date: 2001/01/01 Vol. E84-A No. 1 ; pp. 378-382 Type of Manuscript: LETTER Category: Image Keyword: white-light interferometry, profilometry, focus measure, focus, signal processing,
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