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IEICE Trans

Keyword : microscopic crosssectioning and elemental analysis

Focused Ion Beam Applications to Failure Analysis of Si Device Chip
Kiyoshi NIKAWA 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 1994/01/25
Vol. E77-A  No. 1 ; pp. 174-179
Type of Manuscript:  Special Section PAPER (Special Section on Reliability)
Category: Failure Physics and Failure Analysis
Keyword: 
focused ion beam (FIB), scanning ion microscope (SIM), scanning electron microscope (SEM), transmission electron microscope (TEM), electron beam probing (EBP), microscopic cross-sectioning and observation, microscopic crosssectioning and elemental analysis, aluminum film microstructure observation, 
 Summary | Full Text:PDF