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IEICE Trans

Keyword : batch process

Integration between Scheduling and Design of Batch Systems Based on Petri Net Models
Takashi ITO Susumu HASHIZUME Tomoyuki YAJIMA Katsuaki ONOGI 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 2005/11/01
Vol. E88-A  No. 11 ; pp. 2989-2998
Type of Manuscript:  Special Section PAPER (Special Section on Concurrent/Hybrid Systems: Theory and Applications)
Category: 
Keyword: 
scheduling, batch process, concurrent system, Petri net, integration, 
 Summary | Full Text:PDF
Current Progress in Epitaxial Layer Transfer (ELTRAN(R))
Kiyofumi SAKAGUCHI Nobuhiko SATO Kenji YAMAGATA Tadashi ATOJI Yasutomo FUJIYAMA Jun NAKAYAMA Takao YONEHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/03/25
Vol. E80-C  No. 3 ; pp. 378-387
Type of Manuscript:  INVITED PAPER (Special Issue on SOI Devices and Their Process Technologies)
Category: Wafer Technologies
Keyword: 
porous, BESOI, pre-injection, structure-sensitive etching, hydrogen annealing, edge exclusion, batch process, 
 Summary | Full Text:PDF