Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1996/03/25 Vol. E79-CNo. 3pp. 301-305 Type of Manuscript: Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology) Category: CIM/CAM Keyword: cost performance, cost of equipment ownership, cost of process ownership, wafer cost,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1991/04/25 Vol. E74-CNo. 4pp. 929-937 Type of Manuscript: Special Section PAPER (Special Issue on LSI Memories) Category: ASIC Keyword: