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IEICE Trans

Yoshitaka KITAMON

Role of Hydrogen in Polycrystallne Si by Excimer Laser Annealing
Naoya KAWAMOTO Naoto MATSUO Atsushi MASUDA Yoshitaka KITAMON Hideki MATSUMURA Yasunori HARADA Tadaki MIYOSHI Hiroki HAMADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2005/02/01
Vol. E88-C  No. 2  pp. 241-246
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
polycrystalline Si, excimer laser annealing, hydrogen, secondary grain growth, stress relaxation, Cat-CVD, 
 Summary | Full Text:PDF