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IEICE Trans

Yoshikazu HARADA

Microstructure Analysis Technique of Specific Area by Transmission Electron Microscopy
Yoshifumi HATA Ryuji ETOH Hiroshi YAMASHITA Shinji FUJII Yoshikazu HARADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/04/25
Vol. E77-C  No. 4  pp. 590-594
Type of Manuscript:  Special Section PAPER (Special Issue on LSI Failure Analysis)
Category: 
Keyword: 
TEM, FIB, specimen preparation, cross-sectional specimen, 
 Summary | Full Text:PDF