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IEICE Trans

Xiaopeng WU

PtHf Silicide Formation Utilizing PtHf-Alloy Target for Low Contact Resistivity
Shun-ichiro OHMI Mengyi CHEN Xiaopeng WU Yasushi MASAHIRO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2016/05/01
Vol. E99-C  No. 5  pp. 510-515
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
PtHf-alloy target, PtHf-alloy silicide, contact resistivity, Schottky barrier height, RF magnetron sputtering, 
 Summary | Full Text:PDF