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IEICE Trans

Toshiro FUKUDOME

Advanced Fluorite Regeneration Technology to Recover Spent Fluoride Chemicals Drained from Semi-conductor Manufacturing Process
Nobuhiro MIKI Matagoro MAENO Toshiro FUKUDOME Tadahiro OHMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3  pp. 363-374
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: High-Performance Processing
Keyword: 
granular fluorite regeneration, calcite column, direct conversion, 
 Summary | Full Text:PDF