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IEICE Trans

Tatsuya OKADA

An Application of Laser Annealing Process in Low-Voltage Power MOSFETs
Yi CHEN Tatsuya OKADA Takashi NOGUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2016/05/01
Vol. E99-C  No. 5  pp. 516-521
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
power MOSFETs, laser annealing, shallow junction, electrical characteristics, 
 Summary | Full Text:PDF
An Application of Laser Annealing Process in Low-Voltage Planar Power MOSFETs
Yi CHEN Tatsuya OKADA Takashi NOGUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2016/05/01
Vol. E99-C  No. 5  pp. 601-603
Type of Manuscript:  BRIEF PAPER
Category: Semiconductor Materials and Devices
Keyword: 
low-voltage power MOSFETs, laser annealing, shallow junction, threshold-voltage variation, electrical characteristics, 
 Summary | Full Text:PDF
Effective Laser Crystallizations of Si Films and the Applications on Panel
Takashi NOGUCHI Tatsuya OKADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2014/05/01
Vol. E97-C  No. 5  pp. 401-404
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
Si, TFT, excimer laser annealing (ELA), blue laser diode annealing (BLDA), Si film, glass, flexible sheet, solar cell, 
 Summary | Full Text:PDF