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IEICE Trans

Takeo SATO

Fine Surface Finishing Method for 3-Dimensional Micro Structures
Kenichi TAKAHATA Shinichiro AOKI Takeo SATO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2  pp. 291-296
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachine Technology)
Category: Fabrication
Keyword: 
micro surface finishing, ECM, abrasive grains, electrophoresis, micro-EDM, 3-D micro structure, 
 Summary | Full Text:PDF