Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 56

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 212

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 304

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 323
IEICE Trans

Takefumi OGUMA

Design, Process, and Evaluation of a Tunable Optical Fabry-Perrot Filter Using a Silicon Capacitive Pressure Sensor
Kenichiro SUZUKI Takefumi OGUMA Tetsuji UEDA Takashi SHIBUYA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/09/25
Vol. E83-C  No. 9  pp. 1435-1440
Type of Manuscript:  Special Section PAPER (Special Issue on Current Electromechanical Devices and Their Materials with Recent Innovations)
Category: 
Keyword: 
tunable optical filter, Fabry-Perrot, capacitive pressure sensor, boron-doped silicon, micromachining, 
 Summary | Full Text:PDF