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IEICE Trans

Takashi USAMI

Water Desorption Control of Interlayer Dielectrics to Reduce MOSFET Hot Carrier Degradation
Kimiaki SHIMOKAWA Takashi USAMI Masaki YOSHIMARU 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3  pp. 473-479
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
water desorption, oxide, PECVD, pore, hot-carrier, interlayer, 
 Summary | Full Text:PDF