Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 56

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 212

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 304

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 323
IEICE Trans

Takashi NAMURA

Quantitative Charge Build-Up Evaluation Technique by Using MOS Capacitors with Charge Collecting Electrodes in Wafer Processing
Hiroki KUBO Takashi NAMURA Kenji YONEDA Hiroshi OHISHI Yoshihiro TODOKORO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/02/25
Vol. E79-C  No. 2  pp. 198-205
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: Reliability Analysis
Keyword: 
antenna capacitor, charge build-up, charge to breakdown, ion implantation, 
 Summary | Full Text:PDF