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IEICE Trans

Tadashi NAKATANI

Fabrication Process of Nonarcing Power MEMS Switch
Yu YONEZAWA Noboru WAKATSUKI Yoshio SATOH Tadashi NAKATANI Koichiro SAWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2005/08/01
Vol. E88-C  No. 8  pp. 1629-1634
Type of Manuscript:  Special Section PAPER (Special Section on Recent Development of Electro-Mechanical Devices--Selected Papers from International Session on Electro-Mechanical Devices 2004 (IS-EMD2004)--)
Category: Relays and Switches
Keyword: 
arc discharge, MEMS, arc suppression, contact device, cantilever, 
 Summary | Full Text:PDF