Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2003/06/01 Vol. E86-CNo. 6pp. 1002-1006 Type of Manuscript: Special Section PAPER (Special Issue on Recent Development of Electro-Mechanical Devices (IS-EMD 2002)) Category: Emerging Technologies Keyword: wurtzite structure, GaN, metal-foil, intermediate layer, SiO2,