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IEICE Trans

Shu-Sheng LEE

System Perspective of Electromechanical Devices Development of the NEMS/MEMS Group at National Taiwan University
Chih-Kung LEE Wen-Jong WU Pei-Zen CHANG Long-Sun HUANG Shu-Sheng LEE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/06/01
Vol. E86-C  No. 6  pp. 979-987
Type of Manuscript:  Special Section PAPER (Special Issue on Recent Development of Electro-Mechanical Devices (IS-EMD 2002))
Category: Emerging Technologies
Keyword: 
MEMS, sensors, actuators, precision measurement, AVID, morphinscope, 
 Summary | Full Text:PDF