Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 56

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 212

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 304

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 323
IEICE Trans

Shinya HASEGAWA

Dynamic-Clustering and Grain-Growth Kinetics Effects on Dopant Diffusion in Polysilicon
Masami HANE Shinya HASEGAWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/02/25
Vol. E77-C  No. 2  pp. 112-117
Type of Manuscript:  Special Section PAPER (Special Issue on 1993 VLSI Process and Device Modeling Workshop (VPAD 93))
Category: Process Simulation
Keyword: 
poly-silicon, diffusion, modeling, simulation, 
 Summary | Full Text:PDF