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IEICE Trans

Shigeru KAMINOUCHI

A New Ceramic Emitter Applicable to a Cleanroom
Kazuo OKANO Shigeru KAMINOUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/11/25
Vol. E76-C  No. 11  pp. 1670-1672
Type of Manuscript:  Special Section LETTER (Special Issue on LSI Memories)
Category: Application Specific Memory
Keyword: 
cleanroom, ionizer, particle generation, SiC ceramics, electrostatics, 
 Summary | Full Text:PDF