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IEICE Trans

Seigen OTANI


Effect of Zr/Ti Ratio on the Reliability Characteristics Behavior of Sol-Gel Derived PZT Films on Pt/IrO2 Electrode
Katsuyoshi MATSUURA Kazuaki TAKAI Tetsuro TAMURA Hiroshi ASHIDA Seigen OTANI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1998/04/25
Vol. E81-C  No. 4  pp. 528-536
Type of Manuscript:  Special Section PAPER (Special Issue on Advanced Memory Devices Using High-Dielectric-Constant and Ferroelectric Thin Films)
Category: 
Keyword: 
PZTsol-gelIrO2Zr/Ti ratioreliability
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