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IEICE Trans

Ryuichiro KAMIMURA

Dry Etching Technologies of Optical Device and III-V Compound Semiconductors
Ryuichiro KAMIMURA Kanji FURUTA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2017/02/01
Vol. E100-C  No. 2  pp. 150-155
Type of Manuscript:  INVITED PAPER (Special Section on Fabrication Technologies Supporting the Photonic/Nanostructure Devices)
Category: 
Keyword: 
optical device, III-V compound semiconductor, dry etching, LD, LED, glass, 
 Summary | Full Text:PDF