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IEICE Trans

Reo KOMETANI

Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications
Shinji MATSUI Reo KOMETANI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Vol. E90-C  No. 1  pp. 25-35
Type of Manuscript:  INVITED PAPER (Special Section on Microoptomechatronics)
Category: 
Keyword: 
FIB-CVD, 3-D structure, device, bio-tool, 
 Summary | Full Text:PDF