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IEICE Trans

Naoki HOSHINO

ESR Study of MOSFET Characteristics Degradation Mechanism by Water in Intermetal Oxide
Kazunari HARADA Naoki HOSHINO Mariko Takayanagi TAKAGI Ichiro YOSHII 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/04/25
Vol. E77-C  No. 4  pp. 595-600
Type of Manuscript:  Special Section PAPER (Special Issue on LSI Failure Analysis)
Category: 
Keyword: 
water, ESR, hot carrier, intermetal oxide, silicon dangling bond, 
 Summary | Full Text:PDF