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IEICE Trans

Morio INOUE

Observation Techinique for Process-Induced Defects Using Anodic Oxidation
Morio INOUE Shinji FUJII 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3  pp. 324-327
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: Particle/Defect Control and Analysis
Keyword: 
delineation, defect, anodic oxidation, fabrication, failure analysis, 
 Summary | Full Text:PDF