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IEICE Trans

Mayumi SHIBATA

Issues of Wet Cleaning in ULSI Process
Tsuneo AJIOKA Mayumi SHIBATA Yasuo MIZOKAMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3  pp. 337-342
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: High-Performance Processing
Keyword: 
wet cleaning, metallic contamination, particle, lifetime, 
 Summary | Full Text:PDF